Volume 53, Issue 2 p. 230-243
RESEARCH ARTICLE

Modification of structure and surface morphology in various ZnO facets via low fluence gold swift heavy ion irradiation

Adéla Jagerová

Adéla Jagerová

Neutron Physics Department, Nuclear Physics Institute of the Czech Academy of Sciences, Řež, Czech Republic

Department of Physics, Faculty of Science, J.E. Purkinje University, Ústí nad Labem, Czech Republic

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Petr Malinský

Petr Malinský

Neutron Physics Department, Nuclear Physics Institute of the Czech Academy of Sciences, Řež, Czech Republic

Department of Physics, Faculty of Science, J.E. Purkinje University, Ústí nad Labem, Czech Republic

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Romana Mikšová

Romana Mikšová

Neutron Physics Department, Nuclear Physics Institute of the Czech Academy of Sciences, Řež, Czech Republic

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Ondřej Lalik

Ondřej Lalik

Neutron Physics Department, Nuclear Physics Institute of the Czech Academy of Sciences, Řež, Czech Republic

Department of Physics, Faculty of Science, J.E. Purkinje University, Ústí nad Labem, Czech Republic

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Mariapompea Cutroneo

Mariapompea Cutroneo

Neutron Physics Department, Nuclear Physics Institute of the Czech Academy of Sciences, Řež, Czech Republic

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Oleksandr Romanenko

Oleksandr Romanenko

Neutron Physics Department, Nuclear Physics Institute of the Czech Academy of Sciences, Řež, Czech Republic

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Kateřina Szökölová

Kateřina Szökölová

Department of Inorganic Chemistry, University of Chemistry and Technology, Prague, Czech Republic

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Zdenek Sofer

Zdenek Sofer

Department of Inorganic Chemistry, University of Chemistry and Technology, Prague, Czech Republic

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Petr Slepička

Petr Slepička

Department of Solid State Engineering, University of Chemistry and Technology, Prague, Czech Republic

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Jakub Čížek

Jakub Čížek

Department of Low-Temperature Physics, Faculty of Mathematics and Physics, Charles University, Prague, Czech Republic

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Anna Macková

Corresponding Author

Anna Macková

Neutron Physics Department, Nuclear Physics Institute of the Czech Academy of Sciences, Řež, Czech Republic

Department of Physics, Faculty of Science, J.E. Purkinje University, Ústí nad Labem, Czech Republic

Correspondence

Anna Macková, Nuclear Physics Institute of the Czech Academy of Sciences, v. v. i., Řež 250 68, Czech Republic.

Email: [email protected]

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First published: 29 October 2020
Citations: 1

Abstract

The influence of low fluence high-energy ion irradiation on the modification of the ZnO surface structure and optical properties has been studied. ZnO samples of various orientations, namely, c-plane (0001), a-plane (11–20) and m-plane (10–10), have been implanted with 30-MeV Au ions with fluences ranging from 5 × 109 to 5 × 1011 cm−2. Rutherford backscattering spectrometry in the channelling mode (RBS-C) and Raman spectroscopy has shown the distinct damage accumulation in the irradiated surface layer about 1 μm depending on the ZnO facet being to larger extent evidenced in the m-plane ZnO. Contrary, the a-plane ZnO has been exhibited the lowest Zn disorder. Using atomic force microscopy (AFM), a complex morphology was detected on the irradiated samples containing grains and exhibiting increased roughness, both growing with the Au implantation fluence mainly in m-plane ZnO. Positron annihilation spectroscopy (PAS) has shown distinct defect accumulation at the Au-ion fluence of 5 × 1011 cm−2, where RBS-C and Raman spectroscopy indicated sudden disorder increase in the irradiated layers, probably the creation of more complex clusters of Zn and O vacancies 4VZn + 8VO initiated in connection with an overlap of individual ion impacts. Photoluminescence measurements have shown a distinct near-band-edge (NBE) luminescence, developing with the increasing Au-ion fluence in various ZnO orientations. The m-plane ZnO had the most progressively suppressed NBE in comparison with the other orientations.